Working with Piranha

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Standard operating procedure

  • Book the HF fumehood in CR1.
It is recommended to use a setup where you can run your process undisturbed
  • Gather all necessary glassware:
    • two PTFE (Teflon) beakers
  • Gather all necessary chemicals:
    • Concentrated sulfuric acid
    • Hydrogen peroxide
  • Turn on MQ 30-minute timer. Flush the MQ for 30 seconds
  • Make sure you have compatible tweezers: PTFE (Teflon) or steel.
  • Pour some MQ in one beaker for rinsing. Dry any wet spots on the bench.
  • Calculate the portions of sulfuric acid and Hydrogen peroxide that you would like to mix:
    For 3:1 sratio solurtion
    • Pour 3 parts concentrated sulfuric acid into the empty beaker.
    • Very slowly pour 1 part 30% hydrogen peroxide into the sulfuric acid.
      If H2O2 is poured too fast, fumes appear. The solution will heat up during this step.
  • The solution is now ready for sample cleaning/etching.
  • Dip the samples into the Piranha solution for as long as necessary.
  • Rinse the samples in MQ. Avoid any organic solvents.
  • Dry the samples away from the Piranha solution.
  • Let Piranha cool down until at room temperature.
  • Use a funnel to collect the Piranha waste in the dedicated 1L bottle located at the bottom of the left CR1 cabinet.
    • Write your name and date on the bottle
    • Do not close the cap tightly.
    • Place the bottle at the temporary storage in CR1.
  • Dispose of the MQ in the sink
  • Ensure that all the setup that you used (beakers, volumetrics) is back in their original location.