Working with Piranha
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Standard operating procedure
- Book the HF fumehood in CR1.
- It is recommended to use a setup where you can run your process undisturbed
- Gather all necessary glassware:
- two PTFE (Teflon) beakers
- Gather all necessary chemicals:
- Concentrated sulfuric acid
- Hydrogen peroxide
- Turn on MQ 30-minute timer. Flush the MQ for 30 seconds
- Make sure you have compatible tweezers: PTFE (Teflon) or steel.
- Pour some MQ in one beaker for rinsing. Dry any wet spots on the bench.
- Calculate the portions of sulfuric acid and Hydrogen peroxide that you would like to mix:
- For 3:1 sratio solurtion
- Pour 3 parts concentrated sulfuric acid into the empty beaker.
- Very slowly pour 1 part 30% hydrogen peroxide into the sulfuric acid.
- If H2O2 is poured too fast, fumes appear. The solution will heat up during this step.
- The solution is now ready for sample cleaning/etching.
- Dip the samples into the Piranha solution for as long as necessary.
- Rinse the samples in MQ. Avoid any organic solvents.
- Dry the samples away from the Piranha solution.
- Let Piranha cool down until at room temperature.
- Use a funnel to collect the Piranha waste in the dedicated 1L bottle located at the bottom of the left CR1 cabinet.
- Write your name and date on the bottle
- Do not close the cap tightly.
- Place the bottle at the temporary storage in CR1.
- Dispose of the MQ in the sink
- Ensure that all the setup that you used (beakers, volumetrics) is back in their original location.