Main public logs

Combined display of all available logs of cleanroom. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).

• 14:54, 30 June 2026 Harry talk contribs created page How to evaporate metals in AJA (Created page with "=The genius remote= [https://e-beam.ferrotec.com/wp-content/uploads/sites/7/carrera_genius.pdf| The genius remote] is used to control the coils at the e-beam and manipulate the beam. There are two options: * '''Left joystick:''' controls the amplitude (''how much the beam oscillates'') * '''Right joystick:''' controls the beam position (''where the beam is located or where is the centre of the oscillation'') =Evaporation of metals= The following instructions are based...")
• 14:21, 30 June 2026 Harry talk contribs uploaded a new version of File:Evaporation profile.pdf (replaced as png)
• 14:06, 30 June 2026 Harry talk contribs created page File:Evaporation profile.pdf
• 14:06, 30 June 2026 Harry talk contribs uploaded File:Evaporation profile.pdf
• 14:33, 18 June 2026 Harry talk contribs created page AJA service (Created page with "AJA systems maintenance is described here == Maintenance == === Standard maintenance === # Log cryo temp, base pressure. # Close cryo gate valve. # Turn off ion gauge. # Open loadlock gate valve. # Turn off loadlock turbo. #: While venting: #* Unscrew right port with the linear crucible drive using two 9/16" wrenches. #* Unscrew lid if you intend to open it. #* Above 1e0 Torr loadlock pressure slowly open the vent nitrogen needle valve in front of the chamber. # A...")
• 11:51, 17 June 2026 Harry talk contribs deleted page File:HF bench setup.png (Deleted old revision 20260617115022!HF_bench_setup.png: content before blanking was: "")
• 11:50, 17 June 2026 Harry talk contribs uploaded a new version of File:HF bench setup.png
• 14:58, 15 June 2026 Harry talk contribs created page File:ALD AL2 sequence.jpeg
• 14:58, 15 June 2026 Harry talk contribs uploaded File:ALD AL2 sequence.jpeg
• 14:54, 15 June 2026 Harry talk contribs created page File:TMA init final.jpeg
• 14:54, 15 June 2026 Harry talk contribs uploaded File:TMA init final.jpeg
• 14:52, 15 June 2026 Harry talk contribs deleted page File:ALD AL2 sequence.jpeg (content before blanking was: "")
• 14:52, 15 June 2026 Harry talk contribs created page File:TMA steps.jpeg
• 14:52, 15 June 2026 Harry talk contribs uploaded File:TMA steps.jpeg
• 14:50, 15 June 2026 Harry talk contribs uploaded a new version of File:ALD AL2 sequence.jpeg
• 14:47, 15 June 2026 Harry talk contribs created page File:ALD AL2 sequence.jpeg
• 14:47, 15 June 2026 Harry talk contribs uploaded File:ALD AL2 sequence.jpeg
• 13:22, 15 June 2026 Harry talk contribs created page File:Savannah User Manual.pdf (ALD2 savannah veeco user manual)
• 13:22, 15 June 2026 Harry talk contribs uploaded File:Savannah User Manual.pdf (ALD2 savannah veeco user manual)
• 12:37, 15 June 2026 Harry talk contribs created page File:ALD sequence.jpeg
• 12:37, 15 June 2026 Harry talk contribs uploaded File:ALD sequence.jpeg
• 10:09, 15 June 2026 Harry talk contribs created page Atomic layer deposition (Created page with "An Atomic Layer Deposition (ALD) process is a vapor-phase, thin-film deposition method driven by the chemical saturation of surfaces, allowing for conformal coatings of surfaces with very high aspect ratios. The reason for this uniform coating lies in the '''saturative chemisorption''' of sequential cycles of precursor vapors. =Principles= A repetitive sequence of four steps, so called '''cycle''', achieves the coating of the surface. ==Cycle sequence== # The surface of...")
• 13:18, 22 May 2026 Harry talk contribs created page File:Emergency shower.jpg
• 13:18, 22 May 2026 Harry talk contribs uploaded File:Emergency shower.jpg
• 13:16, 22 May 2026 Harry talk contribs created page File:HF bench setup.png
• 13:16, 22 May 2026 Harry talk contribs uploaded File:HF bench setup.png
• 13:08, 22 May 2026 Harry talk contribs created page HF safety (Created page with "= Working with HF = Hydrofluoric acid (HF) is a highly hazardous chemical with unique properties that require strict safety protocols. This guide outlines the procedures for safe handling, spill response, and emergency actions when working with HF in the cleanroom. '''Warning''' HF can cause severe burns, tissue damage, and systemic toxicity. '''Always follow these guidelines.''' Watch our video on how to safely handle HF: 600px == Chemical...")
• 07:57, 14 April 2026 Harry talk contribs moved page Design template for lithography training to Design template for EBL
• 09:43, 13 April 2026 Chenglee talk contribs moved page Philips TEM to Talos F200i S/TEM (Replacing obsolete system)
• 16:22, 10 April 2026 Chenglee talk contribs created page File:Talos F200i.jpg
• 16:22, 10 April 2026 Chenglee talk contribs uploaded File:Talos F200i.jpg
• 16:17, 10 April 2026 Chenglee talk contribs uploaded a new version of File:Tool Philips TEM.jpg
• 08:12, 9 April 2026 Harry talk contribs created page Recommended parameters for EBL (Created page with "= Cleanroom recommendations= {| class="wikitable" |+125 kV |- |Resist |Si |InAs^UC |InP^UC |GaAs^UC |SiGe |- |A2 |1000 |700 |? |? |? |- |A4 |1200-1300 <ref name="Kringhoej" /> |700 |900 <ref name="Hertel" /> |630 |? |- |A6 |1200 |800 |900-920 <ref name="Hertel" /> |760 |? |- |EL6 |? |? |? |? |? |- |EL9 |450-500 <ref name="Kringhoej">[https://nbi.ku.dk/english/theses/phd-theses/anders-kringhoej/Anders_Kringhoej_P...")
• 13:05, 8 April 2026 Harry talk contribs created page Remote access and N-Drive (Created page with "= Requests for N-drive and remote access = All the requests are handled via the KUIT webpage. Log in with your credentials at the following webpage [https://identity.ku.dk identity.ku.dk]. * Click on <code> Manage user access</code> * <code> Select Users</code> : find your name and click next * Search: ** <code>SGT-FORSK_S4_NBI_CLEANROOM-USER</code> for remote access ** <code>N-SCI-NBI-Cleanroom-W</code> for N-Drive access : ''if you cannot see one of the above options...")
• 12:57, 8 April 2026 Harry talk contribs created page Cleanroom computers (Created page with "There is a number of PCs connected to cleanroom tools. Cleanroom staff is responsible for those. They are used to control fabrication related systems and/or transfer data between them and N-drive. Do not use flash drives or other removable media.")
• 12:53, 8 April 2026 Harry talk contribs created page Design computers (Created page with "= Design PCs = There are '''four''' common computers at QDev/NBI cleanroom dedicated to CAD and EBL prep work, so-called ''Design PCs'', named Design 5 through 8. They are located in '''321'''. Please be mindful that a lot of other people want to use them. Booking is '''mandatory''' on the Booking Calendar, schedule ''3rd Design'', regardless of whether the work is performed locally or remotely. Clean up after yourself -- do not leave windows open and programs ru...")
• 17:26, 17 February 2026 Harry talk contribs created page File:Design phidl.png
• 17:26, 17 February 2026 Harry talk contribs uploaded File:Design phidl.png
• 17:01, 17 February 2026 Harry talk contribs created page Design template for lithography training (Created page with "We recommend using a combination of the following tools for designing devices: ; Klayout or CleWin (only for Windows) ; [Phidl] (python-based) ; Copilot (great tool to boost your productivity)")
• 14:07, 11 November 2025 Harry talk contribs created page File:CH32N4Zr.png
• 14:07, 11 November 2025 Harry talk contribs uploaded File:CH32N4Zr.png
• 15:07, 10 November 2025 Zhe talk contribs created page File:F125.jpg
• 15:07, 10 November 2025 Zhe talk contribs uploaded File:F125.jpg
• 15:06, 10 November 2025 Zhe talk contribs reverted File:Tool Elionix.jpg to an old version (Reverted to version as of 14:04, 5 December 2016 (UTC))
• 15:01, 10 November 2025 Zhe talk contribs uploaded a new version of File:Tool Elionix.jpg
• 14:59, 10 November 2025 Zhe talk contribs created page Elionix F-125 (Created page with "{{Infobox tool |image = Tool Elionix.jpg |toolfullname = Elionix F125 |website = http://www.elionix.co.jp/english/ |company = ELIONIX INC. |description = Electron beam lithography system |location = 01.K03 |primary = Zhe |secondary = Harry }} Elionix F125 is a 125 kV acceleration electron beam lithography tool. == Tool Specification == * Acceleration voltage 50,75,100,125 kV * Minimum beam diameter - 1.8 nm * Beam current - 100 pA to 100nA * Field Size - Min 100 um Ma...")
• 15:49, 5 November 2025 Harry talk contribs created page File:Exiting proceedure V25 2.pdf
• 15:49, 5 November 2025 Harry talk contribs uploaded File:Exiting proceedure V25 2.pdf
• 09:09, 5 November 2025 Martin talk contribs created page File:Sustain.png (sustainability)
• 09:09, 5 November 2025 Martin talk contribs uploaded File:Sustain.png (sustainability)