Fabrication

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Computers and software

Remote access and N-Drive

Cleanroom computers

Design computers

Design software

Booking Calendar

Electron Beam Lithography

Recommended parameters for EBL

Doses

Design template for EBL

BEAMER

ProSEM

TRACER

Lithography

Fundamentals of lithography

Materials & Processes in the NBI Cleanroom

Materials

Resists

Wafers

Processes

Resist spin coating

Cleaning

Ga removal from backside of GaAs wafers

Etching

Preparation of solutions

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