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8 September 2025
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12:38 | Resists 2 changes history +42 [Harry (2×)] | |||
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12:38 (cur | prev) +38 Harry talk contribs (→Electron beam resists) | ||||
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09:58 (cur | prev) +4 Harry talk contribs (→Electron beam resists) | ||||
| N 12:32 | Ga removal from backside of GaAs wafers diffhist +3,281 Harry talk contribs (Created page with "When receiving GaAs wafers, they often come with a layer of gallium on the backside. This layer has turned out to cause quite some troubles, as it introduces an uneven surface on the backside of the wafers. The rough gallium on the backside tends to give high sample inclination and makes it difficult to handle small samples. You can request the growers to remove this Ga layer before shipping. Meanwhile, you need to remove the Ga from the wafers. =Techniques from John W...") | ||||
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12:20 | Etching 8 changes history +1,623 [Harry (8×)] | |||
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12:20 (cur | prev) −31 Harry talk contribs | ||||
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12:18 (cur | prev) +767 Harry talk contribs (→Dry etching) | ||||
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12:15 (cur | prev) +28 Harry talk contribs (→Erch rate with AJA2) | ||||
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12:11 (cur | prev) +8 Harry talk contribs (→Dry etching) | ||||
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12:10 (cur | prev) −938 Harry talk contribs (→Dry etching) | ||||
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12:08 (cur | prev) −107 Harry talk contribs (→24 mTorr) | ||||
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12:05 (cur | prev) +1,649 Harry talk contribs | ||||
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09:54 (cur | prev) +247 Harry talk contribs | ||||
| N 10:05 | Preparation of solutions diffhist +1,007 Harry talk contribs (Created page with "=1M Citric acid solution= #Citric acid in powder form is kept in the cleanroom hallway. #Citric acid is solution is kept in dedicated bottles in CR1 cupboard(by the spin coater) ==Preparation of the bottle== # Clean the bottle with MQ water, multiple times # Take 1L MQ water in this bottle # Keep the bottle on Hot plate @ 85deg # Keep magnetic stirrer running # Take 193gm of Citric acid powder by using weighing balance accurately. (This is very important to weigh accura...") | ||||
| N 09:49 | Wafers diffhist +867 Harry talk contribs (Created page with "You can email cleanroom@nbi.ku.dk to request chips or wafers. In the case that you want to use multiple wafers, you will have to purchase wafers via your own grant. You can store the wafers in the cleanroom as your own property. Please remember to label them clearly. =Silicon wafers= In the cleanroom we have available: ==Bare Si== * Si(001) 1" wafers * Si(001) 2" wafers * Si(001) 4" wafers (boron doped) * Si(111) 6" wafers (instrinsic) ==Si with CVD SiOx== * Si(001...") | ||||