Fabrication

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Computers and software

Design software

Cleanroom PCs

Booking Calendar

Lithography

Fundamentals of lithography

Preparing your sample

Resists

Resist spin coating

Cleaning

Wafers

Ga removal from backside of GaAs wafers

Preparing your design

Doses

BEAMER

TRACER

Processing your sample

Etching

Preparation of solutions

Characterisation software

ProSEM

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