Fabrication: Difference between revisions

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[[Booking Calendar]]
[[Booking Calendar]]
=EBL and GenISys software=
[[Recommended parameters for EBL]]
[[Doses]]
[[BEAMER]]
[[ProSEM]]
[[TRACER]]


=Lithography=
=Lithography=
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[[Ga removal from backside of GaAs wafers]]
[[Ga removal from backside of GaAs wafers]]


=Preparing your design=
[[Doses]]
[[BEAMER]]
[[TRACER]]


=Processing your sample=
=Processing your sample=
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[[Category:Fabrication]]
[[Category:Fabrication]]
=Characterisation software=
[[ProSEM]]

Revision as of 07:53, 9 April 2026