Fabrication: Difference between revisions
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__NOTOC__ | |||
=Computers and software= | |||
[[Design software]] | |||
[[Cleanroom PCs]] | |||
[[Booking Calendar]] | |||
=Lithography= | |||
[[Fundamentals of lithography]] | [[Fundamentals of lithography]] | ||
=Preparing your sample= | |||
[[Resists]] | [[Resists]] | ||
[[Resist spin coating]] | |||
[[Cleaning]] | |||
[[Wafers]] | |||
[[Ga removal from backside of GaAs wafers]] | |||
=Preparing your design= | |||
[[Doses]] | [[Doses]] | ||
[[BEAMER]] | |||
[[TRACER]] | |||
=Processing your sample= | |||
[[Etching]] | |||
[[Preparation of solutions]] | |||
[[Category:Fabrication]] | |||
=Characterisation software= | |||
[[ProSEM]] | |||
Latest revision as of 12:03, 12 September 2025
Computers and software
Lithography
Preparing your sample
Ga removal from backside of GaAs wafers