Fabrication: Difference between revisions
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__NOTOC__ | __NOTOC__ | ||
=Computers and software= | =Computers and software= | ||
[[Remote access and N-Drive]] | |||
[[Cleanroom computers]] | |||
[[Design computers]] | |||
[[Design software]] | [[Design software]] | ||
[[ | [[Booking Calendar]] | ||
=Electron Beam Lithography= | |||
[[Recommended parameters for EBL]] | |||
[[Doses]] | |||
[[BEAMER]] | |||
[[ProSEM]] | |||
[[ | [[TRACER]] | ||
=Lithography= | =Lithography= | ||
[[Fundamentals of lithography]] | [[Fundamentals of lithography]] | ||
[[Design template for lithography training]] | |||
=Preparing your sample= | =Preparing your sample= | ||
| Line 22: | Line 40: | ||
[[Ga removal from backside of GaAs wafers]] | [[Ga removal from backside of GaAs wafers]] | ||
=Processing your sample= | =Processing your sample= | ||
| Line 37: | Line 48: | ||
[[Category:Fabrication]] | [[Category:Fabrication]] | ||
Latest revision as of 08:42, 9 April 2026
Computers and software
Electron Beam Lithography
Recommended parameters for EBL
Lithography
Design template for lithography training
Preparing your sample
Ga removal from backside of GaAs wafers