Alpha-SE ellipsometer: Difference between revisions
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|company = J.A. Woollam | |company = J.A. Woollam | ||
|description = Ellipsometer | |description = Ellipsometer | ||
|location = | |location = Cleanroom 2 | ||
|primary = | |primary = Harry | ||
}} | }} | ||
The Woollam alpha-SE ellipsometer is a characterization tool for transparent thin film thickness and roughness measurements by evaluating change in reflected/transmitted light polarization. | |||
Getting an accurate result relies on your substrate knowledge. | |||
Therefore, it is best to measure your samples before and after film deposition using the same model. | |||
Most users at NBI use it to measure: | |||
* [[Resists|resist]] | |||
* films deposited by [[Cambridge ALD|ALD]] | |||
* in some cases, films deposited by [[AJA systems|PVD]] | |||
* oxide on semiconductor chips | |||
Other alternatives to measure film thickness at the [[Main Page|NBI cleanroom]] facilities: | |||
* [[Bruker Dimension Icon AFM]] | |||
* [[Tencor profilometer]] | |||
* [[Filmetrics reflectometer]] | |||
* in some cases, [[JEOL 7800F]] SEM | |||
== Quick-start guide == | |||
Video on how to operate the alpha-SE Ellipsometer: | Video on how to operate the alpha-SE Ellipsometer: | ||
[[File:Ellipsometer.mp4|500px]] | [[File:Ellipsometer.mp4|500px]] | ||
[https://youtu.be/8NP7sFV3vzo Click here to watch the video on YouTube] | |||
# Prepare for measurement: | |||
#* Turn on using the green button on the top left of the tool. | |||
#* Turn on the small orange pump behind the ellipsometer. | |||
#* Place your sample on the slit in the middle of the instrument. Make sure the two small holes are covered. | |||
#* Flip the ''Sample Vacuum'' switch on the front right of the tool. | |||
# On the PC, open the ''Complete EASE'' software: | |||
#* Mode: Standard | |||
#* Angles: 65°, 70°, 75° | |||
#* Model: choose from list | |||
#* Save Data after Measurement: user choice | |||
#* <code>Measure</code> | |||
# Perform the measurement by following the prompts in the software: | |||
#* Pull out the spring lock and move the laser arm to the requested angle. Make sure the spring locks into the slot. | |||
#* Repeat for the other side. | |||
#* <code>OK</code> | |||
#* Wait until the first part of the measurement finishes. | |||
#* Repeat for all requested angles. | |||
# Read out film thickness value, uncertainty, mean squared error (MSE). | |||
# Finish up: | |||
#* Switch off vacuum | |||
#* Unload sample | |||
#* Turn off pump | |||
#* Turn off tool | |||
# Done! | |||
== Remote access == | |||
* TeamViewer: WOOLLAM | |||
* LogMeIn: WOOLLAM (213) | |||
[[Category:Tools]] | [[Category:Tools]] | ||
[[Category:Characterization]] | [[Category:Characterization]] | ||
Latest revision as of 11:29, 17 October 2024
 | |
| Essentials | |
|---|---|
| Full name | J.A. Woollam alpha-SE Ellipsometer |
| Manufacturer | J.A. Woollam |
| Description | Ellipsometer |
| Location | Cleanroom 2 |
| Responsibility | |
| Primary | Harry |
The Woollam alpha-SE ellipsometer is a characterization tool for transparent thin film thickness and roughness measurements by evaluating change in reflected/transmitted light polarization. Getting an accurate result relies on your substrate knowledge. Therefore, it is best to measure your samples before and after film deposition using the same model.
Most users at NBI use it to measure:
Other alternatives to measure film thickness at the NBI cleanroom facilities:
- Bruker Dimension Icon AFM
- Tencor profilometer
- Filmetrics reflectometer
- in some cases, JEOL 7800F SEM
Quick-start guide
Video on how to operate the alpha-SE Ellipsometer:
Click here to watch the video on YouTube
- Prepare for measurement:
- Turn on using the green button on the top left of the tool.
- Turn on the small orange pump behind the ellipsometer.
- Place your sample on the slit in the middle of the instrument. Make sure the two small holes are covered.
- Flip the Sample Vacuum switch on the front right of the tool.
- On the PC, open the Complete EASE software:
- Mode: Standard
- Angles: 65°, 70°, 75°
- Model: choose from list
- Save Data after Measurement: user choice
Measure
- Perform the measurement by following the prompts in the software:
- Pull out the spring lock and move the laser arm to the requested angle. Make sure the spring locks into the slot.
- Repeat for the other side.
OK- Wait until the first part of the measurement finishes.
- Repeat for all requested angles.
- Read out film thickness value, uncertainty, mean squared error (MSE).
- Finish up:
- Switch off vacuum
- Unload sample
- Turn off pump
- Turn off tool
- Done!
Remote access
- TeamViewer: WOOLLAM
- LogMeIn: WOOLLAM (213)