Fabrication

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Computers and software

Remote access and N-Drive

Cleanroom computers

Design computers

Design software

Booking Calendar

EBL and GenISys software

Recommended parameters for EBL

Lithography

Fundamentals of lithography

Design template for lithography training

Preparing your sample

Resist spin coating

Ga removal from backside of GaAs wafers

Processing your sample

Preparation of solutions

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Fabrication