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16 June 2026
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10:17 | Cambridge ALD 7 changes history +759 [Harry (7×)] | |||
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10:17 (cur | prev) +186 Harry talk contribs (→Vacuum status) | ||||
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10:11 (cur | prev) −3 Harry talk contribs (→ALD1) | ||||
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10:08 (cur | prev) +186 Harry talk contribs (→Recommended heater temperatures) | ||||
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10:04 (cur | prev) +2 Harry talk contribs (→ALD2) | ||||
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10:03 (cur | prev) +2 Harry talk contribs (→ALD1) | ||||
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09:54 (cur | prev) +1 Harry talk contribs (→Recommended heater temperatures) | ||||
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09:30 (cur | prev) +385 Harry talk contribs (→Recommended heater temperatures) | ||||
15 June 2026
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15:07 | Cambridge ALD 9 changes history +965 [Harry (9×)] | |||
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15:07 (cur | prev) −79 Harry talk contribs | ||||
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15:06 (cur | prev) −302 Harry talk contribs (→Troubleshooting) | ||||
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14:07 (cur | prev) +209 Harry talk contribs (→Recommended heater temperatures) | ||||
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13:04 (cur | prev) +269 Harry talk contribs | ||||
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09:16 (cur | prev) +5 Harry talk contribs | ||||
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09:13 (cur | prev) +2 Harry talk contribs | ||||
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09:11 (cur | prev) +1,414 Harry talk contribs (→Standard Operating Procedure) | ||||
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08:58 (cur | prev) −544 Harry talk contribs (→Standard operating procedure) | ||||
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07:58 (cur | prev) −9 Harry talk contribs (→Witness samples) | ||||
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N 15:05 | Atomic layer deposition 10 changes history +3,431 [Harry (10×)] | |||
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15:05 (cur | prev) −4 Harry talk contribs | ||||
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15:04 (cur | prev) −2 Harry talk contribs | ||||
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15:04 (cur | prev) −72 Harry talk contribs (→An ALD cycle in Savannah) | ||||
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15:03 (cur | prev) +651 Harry talk contribs (→Principles) | ||||
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12:50 (cur | prev) +16 Harry talk contribs (→Principles) | ||||
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12:50 (cur | prev) +127 Harry talk contribs | ||||
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12:38 (cur | prev) 0 Harry talk contribs (→Cycle sequence) | ||||
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12:37 (cur | prev) +266 Harry talk contribs (→Cycle sequence) | ||||
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12:29 (cur | prev) +823 Harry talk contribs (→Principles) | ||||
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10:09 (cur | prev) +1,626 Harry talk contribs (Created page with "An Atomic Layer Deposition (ALD) process is a vapor-phase, thin-film deposition method driven by the chemical saturation of surfaces, allowing for conformal coatings of surfaces with very high aspect ratios. The reason for this uniform coating lies in the '''saturative chemisorption''' of sequential cycles of precursor vapors. =Principles= A repetitive sequence of four steps, so called '''cycle''', achieves the coating of the surface. ==Cycle sequence== # The surface of...") | |||