Edwards evaporator
 | |
| Essentials | |
|---|---|
| Full name | Edwards Auto 306 |
| Manufacturer | BOC Edwards |
| Description | Physical vapor deposition system |
| Location | 03.2.213 |
| Responsibility | |
| Primary | Nader |
Other material deposition alternatives at the NBI cleanroom:
- ALD systems
- AJA systems for sputtering/e-gun evaporation
- E-Gun evaporator
- Leica sputter coater
- Molecular beam epitaxy system