Tools

Lithography	Thin film processing	Characterization	Other
Raith eLine Elionix Heidelberg µPG 501 Süss mask aligner	AJA Systems E-Gun evaporator Edwards evaporator Spinners ALD 1 ALD 2 Leica sputter coater MBE	JEOL JSM 6320F JEOL JSM 7800F Raith eLine TEM Alphastep Sensofar optical profiler Optical microscopes AFM	Süss scriber Loomis scriber AccuThermo RTA Biorad oven µ-wave plasma oven Denier RF-asher K&S Ball Bonder Präzitherm hotplates