Tools

Lithography	Thin film & III-V processing	Characterization	Other
Raith eLine Elionix Heidelberg laser writer Süss mask aligner	AJA Systems E-Gun evaporator Edwards thermal evaporator Spinners ALD 1 ALD 2 Leica sputter coater MBE	JEOL JSM 6320F JEOL JSM 7800F Raith eLine TEM Alphastep profilometer Sensofar optical profiler Olympus microscopes AFM	Süss scriber Loomis scriber AccuThermo RTA Biorad oven µ-wave plasma oven Denier RF-asher K&S Ball Bonder Präzitherm hotplates

Tool availability

	Bachelor	Master	PhD	Postdoc
AJAs	Yes	Yes	Yes	Yes
e-gun	Yes	Yes	Yes	Yes
Thermal	Yes	Yes	Yes	Yes
Edwards	Yes	Yes	Yes	Yes

Eline	No	Yes	Yes	Yes
Elionix	No	Yes	Yes	Yes
JEOL 6230F	Yes	Yes	Yes	Yes
JEOL 7800F	No	Yes	Yes	Yes

Heidelberg	Yes	Yes	Yes	Yes
Mask aligner	Yes	Yes	Yes	Yes

Manual scriber	Yes	Yes	Yes	Yes
Loomis scriber	No	No	Yes	Yes

MBE	No	No	Yes	Yes