Süss mask aligner
 | |
| Essentials | |
|---|---|
| Full name | Karl Süss MJB3 |
| Manufacturer | Karl Süss |
| Description | Mask aligner |
| Location | Cleanroom 1 (03.2.209A) |
| Responsibility | |
| Primary | Nader |
Other lithography tools at the NBI cleanroom:
- Elionix 7000 EBL
- Elionix F-125 EBL
- Raith eLine EBL
- Heidelberg µPG 501 LED writer