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Combined display of all available logs of cleanroom. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 07:57, 14 April 2026 Harry talk contribs moved page Design template for lithography training to Design template for EBL
- 09:43, 13 April 2026 Chenglee talk contribs moved page Philips TEM to Talos F200i S/TEM (Replacing obsolete system)
- 16:22, 10 April 2026 Chenglee talk contribs created page File:Talos F200i.jpg
- 16:22, 10 April 2026 Chenglee talk contribs uploaded File:Talos F200i.jpg
- 16:17, 10 April 2026 Chenglee talk contribs uploaded a new version of File:Tool Philips TEM.jpg
- 08:12, 9 April 2026 Harry talk contribs created page Recommended parameters for EBL (Created page with "= Cleanroom recommendations= {| class="wikitable" |+125 kV |- |Resist |Si |InAs<sup>UC</sup> |InP<sup>UC</sup> |GaAs<sup>UC</sup> |SiGe |- |A2 |1000 |700 |? |? |? |- |A4 |1200-1300 <ref name="Kringhoej" /> |700 |900 <ref name="Hertel" /> |630 |? |- |A6 |1200 |800 |900-920 <ref name="Hertel" /> |760 |? |- |EL6 |? |? |? |? |? |- |EL9 |450-500 <ref name="Kringhoej">[https://nbi.ku.dk/english/theses/phd-theses/anders-kringhoej/Anders_Kringhoej_P...")
- 13:05, 8 April 2026 Harry talk contribs created page Remote access and N-Drive (Created page with "= Requests for N-drive and remote access = All the requests are handled via the KUIT webpage. Log in with your credentials at the following webpage [https://identity.ku.dk identity.ku.dk]. * Click on <code> Manage user access</code> * <code> Select Users</code> : find your name and click next * Search: ** <code>SGT-FORSK_S4_NBI_CLEANROOM-USER</code> for remote access ** <code>N-SCI-NBI-Cleanroom-W</code> for N-Drive access : ''if you cannot see one of the above options...")
- 12:57, 8 April 2026 Harry talk contribs created page Cleanroom computers (Created page with "There is a number of PCs connected to cleanroom tools. Cleanroom staff is responsible for those. They are used to control fabrication related systems and/or transfer data between them and N-drive. Do not use flash drives or other removable media.")
- 12:53, 8 April 2026 Harry talk contribs created page Design computers (Created page with "= Design PCs = There are '''four''' common computers at QDev/NBI cleanroom dedicated to CAD and EBL prep work, so-called ''Design PCs'', named Design 5 through 8. They are located in '''321'''. Please be mindful that a lot of other people want to use them. Booking is '''mandatory''' on the Booking Calendar, schedule ''3rd Design'', regardless of whether the work is performed locally or remotely. Clean up after yourself -- do not leave windows open and programs ru...")
- 17:26, 17 February 2026 Harry talk contribs created page File:Design phidl.png
- 17:26, 17 February 2026 Harry talk contribs uploaded File:Design phidl.png
- 17:01, 17 February 2026 Harry talk contribs created page Design template for lithography training (Created page with "We recommend using a combination of the following tools for designing devices: ; Klayout or CleWin (only for Windows) ; [Phidl] (python-based) ; Copilot (great tool to boost your productivity)")
- 14:07, 11 November 2025 Harry talk contribs created page File:CH32N4Zr.png
- 14:07, 11 November 2025 Harry talk contribs uploaded File:CH32N4Zr.png
- 15:07, 10 November 2025 Zhe talk contribs created page File:F125.jpg
- 15:07, 10 November 2025 Zhe talk contribs uploaded File:F125.jpg
- 15:06, 10 November 2025 Zhe talk contribs reverted File:Tool Elionix.jpg to an old version (Reverted to version as of 14:04, 5 December 2016 (UTC))
- 15:01, 10 November 2025 Zhe talk contribs uploaded a new version of File:Tool Elionix.jpg
- 14:59, 10 November 2025 Zhe talk contribs created page Elionix F-125 (Created page with "{{Infobox tool |image = Tool Elionix.jpg |toolfullname = Elionix F125 |website = http://www.elionix.co.jp/english/ |company = ELIONIX INC. |description = Electron beam lithography system |location = 01.K03 |primary = Zhe |secondary = Harry }} Elionix F125 is a 125 kV acceleration electron beam lithography tool. == Tool Specification == * Acceleration voltage 50,75,100,125 kV * Minimum beam diameter - 1.8 nm * Beam current - 100 pA to 100nA * Field Size - Min 100 um Ma...")
- 15:49, 5 November 2025 Harry talk contribs created page File:Exiting proceedure V25 2.pdf
- 15:49, 5 November 2025 Harry talk contribs uploaded File:Exiting proceedure V25 2.pdf
- 09:09, 5 November 2025 Martin talk contribs created page File:Sustain.png (sustainability)
- 09:09, 5 November 2025 Martin talk contribs uploaded File:Sustain.png (sustainability)
- 12:47, 11 September 2025 Harry talk contribs created page File:Screw bonder.png
