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Line 46: Line 46:
! scope="col" width="20%" | Postdoc
! scope="col" width="20%" | Postdoc
|-
|-
| style="text-align:right; padding-right:6px;" | AJAs
| style="text-align:right; padding-right:6px;" | Raith Eline
| style="background-color: #c6e0b4" | Yes
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | e-gun
| style="text-align:right; padding-right:6px;" | Elionix
| style="background-color: #c6e0b4" | Yes
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Thermal
| style="text-align:right; padding-right:6px;" | Heidelberg
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 64: Line 64:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Edwards
| style="text-align:right; padding-right:6px;" | Mask aligner
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 72: Line 72:
| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | Eline
| style="text-align:right; padding-right:6px;" | AJAs
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Elionix
| style="text-align:right; padding-right:6px;" | e-gun
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | JEOL 6230F
| style="text-align:right; padding-right:6px;" | Edwards
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 90: Line 90:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | JEOL 7800F
| style="text-align:right; padding-right:6px;" | Spinners
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="padding-bottom:6px;" |
| style="text-align:right; padding-right:6px;" | ALD
|-
| style="text-align:right; padding-right:6px;" | Heidelberg
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 104: Line 102:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Mask aligner
| style="text-align:right; padding-right:6px;" | Leica
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | MBE
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 112: Line 116:
| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | Manual scriber
| style="text-align:right; padding-right:6px;" | JEOL 6230F
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 118: Line 122:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Loomis scriber
| style="text-align:right; padding-right:6px;" | JEOL 7800F
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | TEM
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | Alphastep
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | Sensofar
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | Microscopes
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | AFM
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
|-
| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | MBE
| style="text-align:right; padding-right:6px;" | Süss scriber
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | Loomis scriber
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | RTA
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | Biorad
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | µ-wave
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | Denier asher
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | Ball-bonder
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | Hotplates
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|}
|}

Revision as of 20:09, 29 November 2016

Tools

Lithography Thin film & III-V processing Characterization Other

Tool availability

Bachelor Master PhD Postdoc
Raith Eline No Yes Yes Yes
Elionix No Yes Yes Yes
Heidelberg Yes Yes Yes Yes
Mask aligner Yes Yes Yes Yes
AJAs Yes Yes Yes Yes
e-gun Yes Yes Yes Yes
Edwards Yes Yes Yes Yes
Spinners Yes Yes Yes Yes
ALD Yes Yes Yes Yes
Leica Yes Yes Yes Yes
MBE No No Yes Yes
JEOL 6230F Yes Yes Yes Yes
JEOL 7800F No Yes Yes Yes
TEM ? ? ? ?
Alphastep ? ? ? ?
Sensofar ? ? ? ?
Microscopes ? ? ? ?
AFM ? ? ? ?
Süss scriber Yes Yes Yes Yes
Loomis scriber No No Yes Yes
RTA ? ? ? ?
Biorad ? ? ? ?
µ-wave ? ? ? ?
Denier asher ? ? ? ?
Ball-bonder ? ? ? ?
Hotplates ? ? ? ?
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