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| Line 35: | Line 35: | ||
* K&S Ball Bonder | * K&S Ball Bonder | ||
* Präzitherm hotplates | * Präzitherm hotplates | ||
|} | |||
{| class="wikitable" | |||
| Tool | |||
| Bachelor | |||
| Master | |||
| PhD and Postdoc | |||
|- | |||
| AJAs | |||
| Yes | |||
| Yes | |||
| Yes | |||
|- | |||
| e-gun | |||
| Yes | |||
| Yes | |||
| Yes | |||
|- | |||
| Thermal | |||
| Yes | |||
| Yes | |||
| Yes | |||
|- | |||
| Edwards | |||
| Yes | |||
| Yes | |||
| Yes | |||
|- | |||
| Eline | |||
| No | |||
| Yes | |||
| Yes | |||
|- | |||
| Elionix | |||
| No | |||
| Yes | |||
| Yes | |||
|- | |||
| JEOL 6230F | |||
| Yes | |||
| Yes | |||
| Yes | |||
|- | |||
| JEOL 7800F | |||
| No | |||
| Yes | |||
| Yes | |||
|- | |||
| Heidelberg | |||
| Yes (3rd year) | |||
| Yes | |||
| Yes | |||
|- | |||
| Mask aligner | |||
| Yes | |||
| Yes | |||
| Yes | |||
|- | |||
| Manual scriber | |||
| Yes | |||
| Yes | |||
| Yes | |||
|- | |||
| Loomis scriber | |||
| No | |||
| No | |||
| Yes | |||
|- | |||
| MBE | |||
| No | |||
| No | |||
| Yes | |||
|} | |} | ||
Revision as of 12:16, 28 November 2016
| Lithography | Thin film & III-V processing | Characterization | Other |
|---|---|---|---|
|
|
|
|
| Tool | Bachelor | Master | PhD and Postdoc |
| AJAs | Yes | Yes | Yes |
| e-gun | Yes | Yes | Yes |
| Thermal | Yes | Yes | Yes |
| Edwards | Yes | Yes | Yes |
| Eline | No | Yes | Yes |
| Elionix | No | Yes | Yes |
| JEOL 6230F | Yes | Yes | Yes |
| JEOL 7800F | No | Yes | Yes |
| Heidelberg | Yes (3rd year) | Yes | Yes |
| Mask aligner | Yes | Yes | Yes |
| Manual scriber | Yes | Yes | Yes |
| Loomis scriber | No | No | Yes |
| MBE | No | No | Yes |