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* [[Süss scriber]]
* [[Süss scriber]]
* Loomis scriber
* Loomis scriber
* [[RTP AW 610]]
* AccuThermo RTA
* Biorad oven
* Biorad oven
* µ-wave plasma oven
* µ-wave plasma oven

Revision as of 20:06, 15 February 2016

Lithography Thin film processing Characterization Other
  • Süss scriber
  • Loomis scriber
  • AccuThermo RTA
  • Biorad oven
  • µ-wave plasma oven
  • Denier RF-asher
  • K&S Ball Bonder
  • Präzitherm hotplates
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