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* TEM
* TEM
* Alphastep
* Alphastep
* Optical profiler
* Sensofar optical profiler
* Optical microscopes
* Optical microscopes
* AFM
* AFM

Revision as of 20:04, 15 February 2016

Lithography Thin film processing Characterization Other
  • Süss scriber
  • Loomis scriber
  • RTP AW 610
  • Biorad oven
  • µ-wave plasma oven
  • Denier RF-asher
  • K&S Ball Bonder
  • Präzitherm hotplates
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