Tools: Difference between revisions

Revision as of 20:28, 15 February 2016

Lithography	Thin film & III-V processing	Characterization	Other
Raith eLine Elionix Heidelberg laser writer Süss mask aligner	AJA Systems E-Gun evaporator Edwards thermal evaporator Spinners ALD 1 ALD 2 Leica sputter coater MBE	JEOL JSM 6320F JEOL JSM 7800F Raith eLine TEM Alphastep profilometer Sensofar optical profiler Olympus microscopes AFM	Süss scriber Loomis scriber AccuThermo RTA Biorad oven µ-wave plasma oven Denier RF-asher K&S Ball Bonder Präzitherm hotplates

@@ Line 11: / Line 11: @@
 * [[AJA Systems]]
 * E-Gun evaporator
-* Edwards evaporator
+* Edwards thermal evaporator
 * Spinners
 * ALD 1