Tools: Difference between revisions

Revision as of 20:25, 15 February 2016

Lithography	Thin film & III-V processing	Characterization	Other
Raith eLine Elionix Heidelberg laser writer Süss mask aligner	AJA Systems E-Gun evaporator Edwards evaporator Spinners ALD 1 ALD 2 Leica sputter coater MBE	JEOL JSM 6320F JEOL JSM 7800F Raith eLine TEM Alphastep profilometer Sensofar optical profiler Optical microscopes AFM	Süss scriber Loomis scriber AccuThermo RTA Biorad oven µ-wave plasma oven Denier RF-asher K&S Ball Bonder Präzitherm hotplates

@@ Line 22: / Line 22: @@
 * [[Raith eLine]]
 * TEM
-* Alphastep
+* Alphastep profilometer
 * Sensofar optical profiler
 * Optical microscopes