Tools: Difference between revisions

Revision as of 20:14, 15 February 2016

Lithography	Thin film & III-V processing	Characterization	Other
Raith eLine Elionix Heidelberg laser writer Süss mask aligner	AJA Systems E-Gun evaporator Edwards evaporator Spinners ALD 1 ALD 2 Leica sputter coater MBE	JEOL JSM 6320F JEOL JSM 7800F Raith eLine TEM Alphastep Sensofar optical profiler Optical microscopes AFM	Süss scriber Loomis scriber AccuThermo RTA Biorad oven µ-wave plasma oven Denier RF-asher K&S Ball Bonder Präzitherm hotplates

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-! Lithography !! Thin film processing !! Characterization !! Other
+! Lithography !! Thin film & III-V processing !! Characterization !! Other
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