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* ALD 1
* ALD 1
* ALD 2
* ALD 2
* [[DC sputter]]
* [[Leica sputter coater]]
* MBE
* MBE
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Revision as of 19:56, 15 February 2016

Lithography Thin film processing Characterization Other
  • Scriber Süss
  • Scriber Loomis
  • RTP AW 610
  • Biorad oven
  • µ-wave plasma oven
  • Denier RF-asher
  • K&S Ball Bonder
  • Präzitherm hotplates
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