Elionix 7000: Difference between revisions

Elionix 7000
Essentials
Full name	Elionix 7000
Manufacturer	ELIONIX INC.
Description	Electron beam lithography system
Location	03.01.K03
Responsibility
Primary	Smitha
Secondary	Zhe

← Older edit

Latest revision as of 10:38, 9 March 2023

Elionix 7000 is a 100 kV acceleration electron beam lithography tool.

Tool Specification

Acceleration voltage -25,50,75,100 kV
Minimum beam diameter - 1.8 nm
Beam current - 100 pA to 40nA
Field Size - Min 75 um X 75 um Max 600 um
Minimum line width - 8nm, 75 um field
Overlay accuracy - 30nm

Other lithography tools at the NBI cleanroom:

Elionix F-125, 125 kV EBL at QuanTech
Raith eLine, 30 kV EBL
Heidelberg µPG 501 LED writer
Süss mask aligner

Important notes on the fire alarm

Fig. 1. Fire alarm panel in the Elionix room.

The Elionix rooms are fitted with an overly sensitive fire alarm. Here is what happens as the room fills with smoke or dust:

A very loud pre-alarm starts to sound.
If the level of smoke increases further, an inert gas is released and the level of oxygen in the room drops to 15% of the normal value. You should leave the room if it gets to this point.

Unfortunately, the detector is too sensitive; it has been known to go off because someone swept the floors of the room next door. Therefore, you need to know how to disable the alarm before the inert gas is released if the pre-alarm goes off.

Locate the control panel for the fire alarm next to the outer door. See Fig. 1.
Turn the left key to the Manual Only position to disable the release of the inert gas.
Turn the middle key labeled Enable Control to unlock the control panel.
Press the button labeled Silence/Sound Alarm to disable the horn.
Press the button labeled Alarm/Fault Warning Silence to disable the buzzer.
When the air is clean again, presse the button labeled Reset to reset the system. Then put all the keys back to their original positions.
Double-check that the left key is in the Auto & Manual position. Otherwise the house will burn down if there is a fire.

Booking rules

Between the hours of 9 am and 6 pm weekdays, every user is allotted a bank of 3 hours of bookable time.
You may distribute these 3 hours across several slots - three 1 hour slots or two 1.5 hour slots, etc.
Please be mindful of other users who might want to use the system for longer in-between your bookings.
You may book only 3 hours on the system at a time (see the after hours exception).
This rolling bank system also means that once you use, say 1 hour of your allotted 3 hours, you can make a new 1 hour booking sometime later.
After hours exception: 9am-6pm weekdays are the normal hours and reservation outside these hours (after hours) are not governed strictly.
However, if you plan to use the tool overnight, please start as late as possible out of consideration for other users.
Cleanroom staff reserves the right to intervene in case of booking system abuse.

Operating instructions and troubleshooting

Currently hosted on the internal QDev wiki.

How to transfer Exposure Files

1) Upload your files in N drive under the folder - " Elionix 100 Exp Files " ( Make sure to create your own folder )

2) Access your files in Elionix Exposure PC and copy them to local users folder .

Note:

Only upload exposure files to the folder .
Please do not access other general file from tool PC
You will find the shortcuts in Desktop

Remote access

Remote access to the tool is only granted to cleanroom staff.

@@ Line 1: / Line 1: @@
 {{Infobox tool
 |image = Tool Elionix.jpg
-|toolfullname = Elionix EBL system
+|toolfullname = Elionix 7000
 |website = http://www.elionix.co.jp/english/
 |company = ELIONIX INC.
 |description = Electron beam lithography system
-|location = 03.2.TBD
+|location = 03.01.K03
-|primary = Shiv
+|primary = Smitha
-|secondary = Pétur
+|secondary = Zhe
-|limits = TBD
-|computer = TBD
-|manual = TBD
 }}
-= Booking rules (last update: 11th Nov, 2014) =
+Elionix 7000 is a 100 kV acceleration electron beam lithography tool.
-*Between the hours of 9 am and 6 pm weekdays, every user is allotted a bank of 3 hours of bookable time.
+== Tool Specification ==
-*You may distribute these 3 hours across several slots - three 1 hour slots or two 1.5 hour slots, etc
+* Acceleration voltage -25,50,75,100 kV
-*You may book only 3 hours on the system at a time (See the after hours exception)
+* Minimum beam diameter - 1.8 nm
-*This rolling bank system also means that once you use, say 1 hour of your allotted 3 hours, you can make a new 1 hour booking sometime later.
+* Beam current - 100 pA to 40nA
-*After hours exception: 9am-6pm weekdays are the normal hours and reservation outside these hours (after hours) are not governed strictly. However, if I see unfair usage of the tool in this period, I will intervene.
+* Field Size - Min 75 um X 75 um  Max 600 um
-<del>Only one booking allowed at a time between 9am-6pm on weekdays, no regulations outside of these hours. Last updated: 15 Apr 2014.</del>
+* Minimum line width - 8nm, 75 um field
+* Overlay accuracy - 30nm
-= Elionix update log: =
+Other lithography tools at the [[Main Page|NBI cleanroom]]:
+* [[Elionix F-125]], 125 kV EBL at QuanTech
+* [[Raith eLine]], 30 kV EBL
+* [[Heidelberg µPG 501]] LED writer
+* [[Süss mask aligner]]
-<div class="toccolours mw-collapsible mw-collapsed">
+== Important notes on the fire alarm ==
-'''4th June, 2014''': Semi-annual maintenance visit - new aperture set. User defined beam conditions are far from optimum. The engineer has reconditioned the ones stored under the '''Default''' user account. Use those as a starting point and save under your own user account.
+[[File:ElionixFireAlarmPanel.jpg|thumb|left|Fig. 1. Fire alarm panel in the Elionix room.]]
-<div class="mw-collapsible-content">
+The Elionix rooms are fitted with an overly sensitive fire alarm. Here is what happens as the room fills with smoke or dust:
-# No obvious cause for the occasional stage drift was found. The system continues to meet the <20 nm stitching and overlay accuracy specs.
+# A very loud ''pre''-alarm starts to sound.
-</div>
+# If the level of smoke increases further, an inert gas is released and the level of oxygen in the room drops to 15% of the normal value. You should leave the room if it gets to this point.
-</div>
-<div class="toccolours mw-collapsible mw-collapsed">
-'''14th Apr, 2014''': SEM software update, WECAS gui update, exposure firmware update
-<div class="mw-collapsible-content">
-# SEM software update. Seems like a minor update b.01 to b.02.
-# WECAS has shiny new icons. Basic workflow remains the same.
-# Search position repeatibility now set to a default value of 1 nm
-# Brightness automatically set to 200 during auto field correct procedures
-# New pop up menu during manual and auto registration which displays the current state in the reg2 procedure
-# Auto registration needs the search position repeatibility to be set to 30 nm otherwise it will get stuck in a loop trying to get the number down to 1 nm
-</div>
-</div>
-<div class="toccolours mw-collapsible mw-collapsed">
+Unfortunately, the detector is too sensitive; it has been known to go off because someone swept the floors of the room next door. Therefore, you need to know how to disable the alarm before the inert gas is released if the ''pre''-alarm goes off.
-'''4th Dec, 2013''': Filament change, aperture change, new field correction markers, SEM software update
+# Locate the control panel for the fire alarm next to the outer door. See Fig. 1.
-<div class="mw-collapsible-content">
+# Turn the left key to the <code>Manual Only</code> position to disable the release of the inert gas.
-#You can now choose 960 000 dots for any given write field. The minimum dwell time remains  fixed at 0.06 us.
+# Turn the middle key labeled <code>Enable Control</code> to unlock the control panel.
-#We have a new set of markers for field correction. Only I change the markers periodically. If you have trouble with field correction (>5 attempts):
+# Press the button labeled <code>Silence/Sound Alarm</code> to disable the horn.
-##Is your brightness ~200 (or more)?
+# Press the button labeled <code>Alarm/Fault Warning Silence</code> to disable the buzzer.
-##Have you waited atleast 20 mins after conditioning the beam? Column drift, especially after a large change in current will lead to failed field correction
+# When the air is clean again, presse the button labeled <code>Reset</code> to reset the system. ''Then'' put all the keys back to their original positions.
-## Sometimes field correction converges in 1-2 attempts before starting the exposure, but the FC between two registrations does not converge (or takes more than 5-6 attempts). This problem arises if the chip fixed at an angle larger than +-3 deg. Be aware that the brace itself could be screwed down at an angle, thereby messing up your chip orientation.
+# Double-check that the left key is in the <code>Auto & Manual</code> position. Otherwise the house will burn down if there is a fire.
-##If you have followed the above guidelines and still have a problem, there is a chance the marker has been contaminated and need to pick a new marker. Call me (Shiv +45 2128 9025) and I'll guide you to pick a new marker OR change it yourself BUT let me know so I can mark the previous marker as used. It is important to keep track of used markers.
-#There is a new 'auto focus and stigmation' button. The algorithm is rough around the edges and only works at the reference position with circular gold features. Choose your magnification well. Too high and magnification and the resulting contamination will interfere with the auto focusing.  At the end of the day, you'll probably still need to fine tune it manually.
-#Registration: Manu. H. and Auto H. have been replaced with just Manual and Auto. Manual is the same as Manu. H., however Auto keeps trying until the tolerance is less than specified value. For Auto registration, use a search position repeatibility of 30 nm.
-#The engineers have replaced the filament and the apertures in the system. They have readjusted the beam condition settings for the account 'Default'. Use those values as a starting point and save them to your designated account. The older conditions in your accounts will be far from the optimum.
-</div>
-</div>
-= Manuals and Guides =
+== Booking rules ==
-== Local Qdev versions - cheat sheet & detailed guide ==
+* Between the hours of 9 am and 6 pm weekdays, every user is allotted a bank of 3 hours of bookable time.
-<div class="toccolours mw-collapsible mw-collapsed">
+* You may distribute these 3 hours across several slots - three 1 hour slots or two 1.5 hour slots, etc.
-* [https://wiki.nbi.ku.dk/qdevwiki/ElionixCheatSheet Cheat sheet (based on text by Henri)]
+* Please be mindful of other users who might want to use the system for longer in-between your bookings.
-<div class="mw-collapsible-content">
+* You may book only 3 hours on the system at a time (see the after hours exception).
-* [[Media:ElionixQDevManual.pdf|QDev Elionix manual]] &mdash; written before the upgrade (linux->windows GUI), last updated 2013-03-05. Source repository [http://qdev-data.fys.ku.dk/git/repositories/view/guides/elionix-guide/ here], upload new pdf versions to [[File:ElionixQDevManual.pdf]].
+* This rolling bank system also means that once you use, say 1 hour of your allotted 3 hours, you can make a new 1 hour booking sometime later.
-* [[Media:Elionix_Manual_v2.pdf|Manual from Jimmy and Hugh]] &mdash; pertains to Harvard system, last updated 4/9/09.
+* After hours exception: 9am-6pm weekdays are the normal hours and reservation outside these hours (after hours) are not governed strictly.
+*: However, if you plan to use the tool overnight, please start as late as possible out of consideration for other users.
+* Cleanroom staff reserves the right to intervene in case of booking system abuse.
-=== Official ===
+== Operating instructions and troubleshooting ==
+Currently hosted on the [https://wiki.nbi.ku.dk/qdevwiki/ElionixCheatSheet internal QDev wiki.]
-* After upgrade:
+== How to transfer Exposure Files ==
-** [[Media:ElionixOverlayExposure.pdf|Overlay Exposures (Quick Reference)]] &mdash; by Taichi when he was in DK.
-** [[Media:ElionixGUITraining.pdf|Lose Ends from Training Session]] &mdash; by Taichi when he was in DK.
-* Before upgrade
+) Upload your files in N drive under the folder - " Elionix 100 Exp Files " ( Make sure to create your own folder )
-**[[Media:ElionixManualFull.pdf|Elionix 7000 User Manual (Full)]]
-**[[Media:ElionixFieldCorrectionTips.pdf|Field correction tips]] &mdash; by Taichi when he was in DK.
-**[[Media:ElionixTrainingSummary.pdf|Training summary]] &mdash; by Taichi when he was in DK.
-**[[Media:ElionixApertureAdjust.pdf|Aperture initialization and adjustment]] &mdash; by Taichi when he was in DK.
-**[[Media:ElionixStopStartManual.pdf|System shutdown and start-up manual]] &mdash; by Taichi when he was in DK.
-</div>
+) Access your files in Elionix Exposure PC and copy them to local users folder .
-</div>
+Note:
+* Only upload exposure files to the folder .
+* Please do not access other general file from tool PC
+* You will find the shortcuts in Desktop
-= Design PC =
-This is the PC in the Elionix room in the basement, next to the two racks with elionix hardware. You may use this PC to ready your design, convert to *.cell & *.con formats. The desktop has all the shortcuts to network folders (Design computers on the 4th floor, shared images from SEM PC and user folder from Exposure PC) and relevant software. Any files outsides the designated user folders (shortcut on desktop) can be deleted without warning. The login credentials are:
-: Username: ''Nanouser''
-: Password:
-The PC is labeled ''Elionix''.
+=== Remote access ===
+Remote access to the tool is only granted to cleanroom staff.
+[[Category:Tools]]
+[[Category:Lithography]]