Edwards evaporator: Difference between revisions
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This tool has been decommissioned from the NBI cleanroom | |||
Other material deposition alternatives at the [[Main Page|NBI cleanroom]]: | Other material deposition alternatives at the [[Main Page|NBI cleanroom]]: | ||
Latest revision as of 15:11, 13 August 2026
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| Essentials | |
|---|---|
| Full name | Edwards Auto 306 |
| Manufacturer | BOC Edwards |
| Description | Physical vapor deposition system |
| Location | 03.2.213 |
| Responsibility | |
| Primary | Nader |
This tool has been decommissioned from the NBI cleanroom
Other material deposition alternatives at the NBI cleanroom:
- ALD systems
- AJA systems for sputtering/e-gun evaporation
- E-Gun evaporator
- Leica sputter coater
- Molecular beam epitaxy system