Edwards evaporator: Difference between revisions
Jump to navigation
Jump to search
Created page with "{{Infobox tool |image = Tool Edwards.jpg |toolfullname = Edwards Auto 306 |website = TBD |company = TBD |description = TBD |location = TBD |primary = TBD |secondary = TBD |lim..." |
No edit summary |
||
| (4 intermediate revisions by 2 users not shown) | |||
| Line 2: | Line 2: | ||
|image = Tool Edwards.jpg | |image = Tool Edwards.jpg | ||
|toolfullname = Edwards Auto 306 | |toolfullname = Edwards Auto 306 | ||
|website = | |website = https://www.edwardsvacuum.com/ | ||
|company = | |company = BOC Edwards | ||
|description = | |description = Physical vapor deposition system | ||
|location = | |location = 03.2.213 | ||
|primary = | |primary = Nader | ||
}} | }} | ||
This tool has been decommissioned from the NBI cleanroom | |||
Other material deposition alternatives at the [[Main Page|NBI cleanroom]]: | |||
* [[Cambridge ALD|ALD systems]] | |||
* [[AJA systems]] for sputtering/e-gun evaporation | |||
* [[E-Gun evaporator]] | |||
* [[Leica sputter coater]] | |||
* [[MBE|Molecular beam epitaxy system]] | |||
[[Category:Tools]] | |||
[[Category:Deposition]] | |||
Latest revision as of 15:11, 13 August 2026
 | |
| Essentials | |
|---|---|
| Full name | Edwards Auto 306 |
| Manufacturer | BOC Edwards |
| Description | Physical vapor deposition system |
| Location | 03.2.213 |
| Responsibility | |
| Primary | Nader |
This tool has been decommissioned from the NBI cleanroom
Other material deposition alternatives at the NBI cleanroom:
- ALD systems
- AJA systems for sputtering/e-gun evaporation
- E-Gun evaporator
- Leica sputter coater
- Molecular beam epitaxy system