Süss mask aligner: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
added tool alternatives |
||
| (2 intermediate revisions by the same user not shown) | |||
| Line 5: | Line 5: | ||
|company = Karl Süss | |company = Karl Süss | ||
|description = Mask aligner | |description = Mask aligner | ||
|location = Cleanroom 1 | |location = Cleanroom 1 (03.2.209A) | ||
|primary = Nader | |primary = Nader | ||
}} | }} | ||
Other lithography tools at the [[Main Page|NBI cleanroom]]: | |||
* [[Elionix 7000]] EBL | |||
* [[Elionix F-125]] EBL | |||
* [[Raith eLine]] EBL | |||
* [[Heidelberg µPG 501]] LED writer | |||
[[Category:Tools]] | |||
[[Category:Lithography]] | |||
Latest revision as of 17:07, 10 April 2022
 | |
| Essentials | |
|---|---|
| Full name | Karl Süss MJB3 |
| Manufacturer | Karl Süss |
| Description | Mask aligner |
| Location | Cleanroom 1 (03.2.209A) |
| Responsibility | |
| Primary | Nader |
Other lithography tools at the NBI cleanroom:
- Elionix 7000 EBL
- Elionix F-125 EBL
- Raith eLine EBL
- Heidelberg µPG 501 LED writer