Süss mask aligner: Difference between revisions
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{{Infobox tool | {{Infobox tool | ||
|image = Tool MA.jpg | |image = Tool MA.jpg | ||
|toolfullname = | |toolfullname = Karl Süss MJB3 | ||
|website = | |website = https://www.suss.com/ | ||
|company = | |company = Karl Süss | ||
|description = | |description = Mask aligner | ||
|location = | |location = Cleanroom 1 (03.2.209A) | ||
|primary = | |primary = Nader | ||
}} | }} | ||
Other lithography tools at the [[Main Page|NBI cleanroom]]: | |||
* [[Elionix 7000]] EBL | |||
* [[Elionix F-125]] EBL | |||
* [[Raith eLine]] EBL | |||
* [[Heidelberg µPG 501]] LED writer | |||
[[Category:Tools]] | |||
[[Category:Lithography]] | |||
Latest revision as of 17:07, 10 April 2022
 | |
| Essentials | |
|---|---|
| Full name | Karl Süss MJB3 |
| Manufacturer | Karl Süss |
| Description | Mask aligner |
| Location | Cleanroom 1 (03.2.209A) |
| Responsibility | |
| Primary | Nader |
Other lithography tools at the NBI cleanroom:
- Elionix 7000 EBL
- Elionix F-125 EBL
- Raith eLine EBL
- Heidelberg µPG 501 LED writer