Tools

Lithography	Thin film processing	Characterization	Other
Raith eLine Elionix Heidelberg µPG 501 Süss mask aligner	AJA Systems E-Gun evaporator Edwards evaporator Spinners ALD 1 ALD 2 DC sputter MBE	JEOL JSM 6320F JEOL JSM 7800F Raith eLine TEM Alphastep Optical profiler Optical microscopes AFM	Scriber Süss Scriber Loomis RTP AW 610 Biorad oven µ-wave plasma oven Denier RF-asher K&S Ball Bonder Präzitherm hotplates