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12 February 2025
- 14:4314:43, 12 February 2025 diff hist −2 BEAMER →Import
10 February 2025
- 16:3116:31, 10 February 2025 diff hist +3,154 N ProSEM Created page with "ProSEM is an image analysis software to measure features in digital images manually or automatically. It is part of the BEAMER package together with TRACER. At NBI it is available up to version '''2.9.2'''. The power of ProSEM is the ability to define a measurement ''recipe'' and apply it to multiple images. Any step of the recipe can be partly or fully scriptable. There are two useful [https://sds.genisys-gmbh.com/nextcloud/index.php/s/BMzQxeSLCymXDZS webinars..." current
- 16:2816:28, 10 February 2025 diff hist +12 Fabrication No edit summary
- 16:2716:27, 10 February 2025 diff hist −89 TRACER →Creating a new PSF current
- 16:2716:27, 10 February 2025 diff hist +3,109 N TRACER Created page with "TRACER is part of the BEAMER software package. Using TRACER you can calculate a point spread function (PSF) for your specific substrate and material stack. It is done by defining material layers and running a Monte Carlo simulation for a large number of electrons. The result can be exported for use in Beamer PEC. [https://www.genisys-gmbh.com/tracer.html Website] == How to: make a PEC for a new material stack == This is a short step-by-step guide. For a more thoro..."
- 16:2516:25, 10 February 2025 diff hist +12 Fabrication No edit summary
- 16:2416:24, 10 February 2025 diff hist +976 BEAMER No edit summary
- 15:4915:49, 10 February 2025 diff hist +3,760 BEAMER No edit summary
- 15:4315:43, 10 February 2025 diff hist −69 BEAMER →Quick-start guide
- 15:4315:43, 10 February 2025 diff hist +258 BEAMER No edit summary
- 15:4215:42, 10 February 2025 diff hist +783 N BEAMER Created page with "Beamer is a software package used to process design files (.dxf, .gds, etc.) and make them ready for e-beam lithography machines. Crucially, it includes a proximity error correction (PEC) module. For any questions regarding Beamer use, please first refer to the manual: '''Help > Help Manual (F1).''' Elionix-specific documentation: '''Help > Formatter Notes > Elionix'''. It thoroughly covers all modules, their use, some theory, as well as includes helpful examples. On..."
- 15:4215:42, 10 February 2025 diff hist +12 Fabrication No edit summary
6 February 2025
- 15:1615:16, 6 February 2025 diff hist 0 About →Staff
- 15:1515:15, 6 February 2025 diff hist +7 About →Staff
7 January 2025
- 10:2910:29, 7 January 2025 diff hist +2 Cambridge ALD →Troubleshooting
- 10:2810:28, 7 January 2025 diff hist +28 Cambridge ALD →Troubleshooting
2 January 2025
- 15:0815:08, 2 January 2025 diff hist −1 Cambridge ALD No edit summary
20 December 2024
- 11:0111:01, 20 December 2024 diff hist +98 Resist spin coating →Set up your workspace current
- 11:0011:00, 20 December 2024 diff hist +1 Resist spin coating →Laurell spin coaters
- 11:0011:00, 20 December 2024 diff hist −13 Laurell spinners No edit summary current
- 10:5910:59, 20 December 2024 diff hist +12 Laurell spinners →Usage rules
- 10:5110:51, 20 December 2024 diff hist +142 Resist spin coating →How to spin coat
- 10:4810:48, 20 December 2024 diff hist 0 Resist spin coating →How to behave
- 10:4810:48, 20 December 2024 diff hist 0 Resist spin coating →Cleaning and baking
- 10:4710:47, 20 December 2024 diff hist +108 Resist spin coating →Cleaning and baking
- 10:4310:43, 20 December 2024 diff hist −16 Resist spin coating →How to behave
- 10:2610:26, 20 December 2024 diff hist 0 Resist spin coating →How to behave
- 10:2610:26, 20 December 2024 diff hist +6 Resist spin coating →How to behave
19 December 2024
- 13:2113:21, 19 December 2024 diff hist +10 Resist spin coating →Set up your workspace
- 13:1913:19, 19 December 2024 diff hist −1 Resist spin coating →Cleaning and baking
- 13:1813:18, 19 December 2024 diff hist +1 Resist spin coating →Cleaning and baking
- 13:1813:18, 19 December 2024 diff hist −3 Resist spin coating →Cleaning and baking
- 13:1713:17, 19 December 2024 diff hist +267 Resist spin coating →How to spin coat
- 12:3412:34, 19 December 2024 diff hist +145 Resist spin coating →How to spin coat
- 12:3112:31, 19 December 2024 diff hist −24 Resist spin coating →How to spin coat
- 12:2812:28, 19 December 2024 diff hist +236 Resist spin coating →How to spin coat
17 December 2024
- 09:5409:54, 17 December 2024 diff hist +8 Cambridge ALD →Troubleshooting
- 09:5009:50, 17 December 2024 diff hist 0 Cambridge ALD →Troubleshooting
- 09:5009:50, 17 December 2024 diff hist −2 Cambridge ALD →Troubleshooting
- 09:4909:49, 17 December 2024 diff hist +265 Cambridge ALD →Troubleshooting
- 09:4709:47, 17 December 2024 diff hist −12 Cambridge ALD →References
- 09:4609:46, 17 December 2024 diff hist −21 Cambridge ALD →References
- 09:4609:46, 17 December 2024 diff hist +50 Cambridge ALD No edit summary
- 09:4509:45, 17 December 2024 diff hist +533 Cambridge ALD →Troubleshooting
16 December 2024
- 17:3317:33, 16 December 2024 diff hist +36 Resist spin coating →How to spin coat
- 17:3117:31, 16 December 2024 diff hist +70 Resist spin coating →How to behave
- 17:3017:30, 16 December 2024 diff hist +2,561 N Resist spin coating Created page with "= How to behave = * Always think of safety first! * Wait patiently for the previous user to finish their process in the spin coater and then you can start using the fumehoom. * Minimise the duration for which the resist bottle stays open (without a lid). * Clean the spinner and the chuck until there are no resist marks left ** Use 1,3 Dioxolane for CSAR and LOR3B resists ** In any other case use Acetone = How to spin coat = * Log your process in the designat..."
- 16:5116:51, 16 December 2024 diff hist +25 Fabrication No edit summary
2 December 2024
- 16:3116:31, 2 December 2024 diff hist +120 Dicing saw →Tool specifications current
- 16:2816:28, 2 December 2024 diff hist −11 Dicing saw →Blade parameters