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10 February 2025
- 15:4215:42, 10 February 2025 diff hist +783 N BEAMER Created page with "Beamer is a software package used to process design files (.dxf, .gds, etc.) and make them ready for e-beam lithography machines. Crucially, it includes a proximity error correction (PEC) module. For any questions regarding Beamer use, please first refer to the manual: '''Help > Help Manual (F1).''' Elionix-specific documentation: '''Help > Formatter Notes > Elionix'''. It thoroughly covers all modules, their use, some theory, as well as includes helpful examples. On..."
- 15:4215:42, 10 February 2025 diff hist +12 Fabrication No edit summary
6 February 2025
- 15:1615:16, 6 February 2025 diff hist 0 About →Staff
- 15:1515:15, 6 February 2025 diff hist +7 About →Staff
7 January 2025
- 10:2910:29, 7 January 2025 diff hist +2 Cambridge ALD →Troubleshooting
- 10:2810:28, 7 January 2025 diff hist +28 Cambridge ALD →Troubleshooting
2 January 2025
- 15:0815:08, 2 January 2025 diff hist −1 Cambridge ALD No edit summary
20 December 2024
- 11:0111:01, 20 December 2024 diff hist +98 Resist spin coating →Set up your workspace current
- 11:0011:00, 20 December 2024 diff hist +1 Resist spin coating →Laurell spin coaters
- 11:0011:00, 20 December 2024 diff hist −13 Laurell spinners No edit summary current
- 10:5910:59, 20 December 2024 diff hist +12 Laurell spinners →Usage rules
- 10:5110:51, 20 December 2024 diff hist +142 Resist spin coating →How to spin coat
- 10:4810:48, 20 December 2024 diff hist 0 Resist spin coating →How to behave
- 10:4810:48, 20 December 2024 diff hist 0 Resist spin coating →Cleaning and baking
- 10:4710:47, 20 December 2024 diff hist +108 Resist spin coating →Cleaning and baking
- 10:4310:43, 20 December 2024 diff hist −16 Resist spin coating →How to behave
- 10:2610:26, 20 December 2024 diff hist 0 Resist spin coating →How to behave
- 10:2610:26, 20 December 2024 diff hist +6 Resist spin coating →How to behave
19 December 2024
- 13:2113:21, 19 December 2024 diff hist +10 Resist spin coating →Set up your workspace
- 13:1913:19, 19 December 2024 diff hist −1 Resist spin coating →Cleaning and baking
- 13:1813:18, 19 December 2024 diff hist +1 Resist spin coating →Cleaning and baking
- 13:1813:18, 19 December 2024 diff hist −3 Resist spin coating →Cleaning and baking
- 13:1713:17, 19 December 2024 diff hist +267 Resist spin coating →How to spin coat
- 12:3412:34, 19 December 2024 diff hist +145 Resist spin coating →How to spin coat
- 12:3112:31, 19 December 2024 diff hist −24 Resist spin coating →How to spin coat
- 12:2812:28, 19 December 2024 diff hist +236 Resist spin coating →How to spin coat
17 December 2024
- 09:5409:54, 17 December 2024 diff hist +8 Cambridge ALD →Troubleshooting
- 09:5009:50, 17 December 2024 diff hist 0 Cambridge ALD →Troubleshooting
- 09:5009:50, 17 December 2024 diff hist −2 Cambridge ALD →Troubleshooting
- 09:4909:49, 17 December 2024 diff hist +265 Cambridge ALD →Troubleshooting
- 09:4709:47, 17 December 2024 diff hist −12 Cambridge ALD →References
- 09:4609:46, 17 December 2024 diff hist −21 Cambridge ALD →References
- 09:4609:46, 17 December 2024 diff hist +50 Cambridge ALD No edit summary
- 09:4509:45, 17 December 2024 diff hist +533 Cambridge ALD →Troubleshooting
16 December 2024
- 17:3317:33, 16 December 2024 diff hist +36 Resist spin coating →How to spin coat
- 17:3117:31, 16 December 2024 diff hist +70 Resist spin coating →How to behave
- 17:3017:30, 16 December 2024 diff hist +2,561 N Resist spin coating Created page with "= How to behave = * Always think of safety first! * Wait patiently for the previous user to finish their process in the spin coater and then you can start using the fumehoom. * Minimise the duration for which the resist bottle stays open (without a lid). * Clean the spinner and the chuck until there are no resist marks left ** Use 1,3 Dioxolane for CSAR and LOR3B resists ** In any other case use Acetone = How to spin coat = * Log your process in the designat..."
- 16:5116:51, 16 December 2024 diff hist +25 Fabrication No edit summary
2 December 2024
- 16:3116:31, 2 December 2024 diff hist +120 Dicing saw →Tool specifications current
- 16:2816:28, 2 December 2024 diff hist −11 Dicing saw →Blade parameters
- 16:2816:28, 2 December 2024 diff hist +62 Dicing saw →Sapphire dicing components
- 16:2516:25, 2 December 2024 diff hist +109 Dicing saw →Tool specifications
- 16:2016:20, 2 December 2024 diff hist +105 Dicing saw No edit summary
- 16:1316:13, 2 December 2024 diff hist +70 Dicing saw →Tool specifications
- 16:1216:12, 2 December 2024 diff hist −1 Dicing saw No edit summary
- 16:0816:08, 2 December 2024 diff hist −34 Dicing saw →Si dicing components
- 16:0616:06, 2 December 2024 diff hist +52 Dicing saw No edit summary
- 16:0316:03, 2 December 2024 diff hist +114 Dicing saw →Si dicing components
- 15:4315:43, 2 December 2024 diff hist +2 Dicing saw No edit summary
- 15:4315:43, 2 December 2024 diff hist −2 Micromanipulator No edit summary current