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* [[AJA Systems]] | * [[AJA Systems]] | ||
* E-Gun evaporator | * E-Gun evaporator | ||
* Edwards evaporator | |||
* Spinners | * Spinners | ||
* ALD 1 | * ALD 1 | ||
| Line 33: | Line 34: | ||
* Denier RF-asher | * Denier RF-asher | ||
* K&S Ball Bonder | * K&S Ball Bonder | ||
* | * Präzitherm hotplates | ||
|} | |} | ||
Revision as of 19:52, 15 February 2016
| Lithography | Thin film processing | Characterization | Other |
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