Tools: Difference between revisions

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* AFM
* AFM
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| style="width: 20%;" |
* Scriber Süss
* [[Scriber Süss]]
* Scriber Loomis
* Scriber Loomis
* [[RTP AW 610]]
* [[RTP AW 610]]

Revision as of 10:47, 15 February 2016

Lithography Thin film processing Characterization Other
  • AJA Systems
  • E-Gun evaporator
  • Spinners
  • ALD 1
  • ALD 2
  • DC sputter
  • MBE
  • Scriber Süss
  • Scriber Loomis
  • RTP AW 610
  • Biorad oven
  • µ-wave plasma oven
  • Denier RF-asher
  • K&S Ball Bonder
  • Edwards evaporator
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