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* MBE
* MBE
| style="width: 20%;" |
| style="width: 20%;" |
* JEOL JSM 6320F
* [[JEOL JSM 6320F]]
* [[JEOL 7800F|JEOL JSM 7800F]]
* [[JEOL 7800F|JEOL JSM 7800F]]
* [[Raith eLine]]
* [[Raith eLine]]

Revision as of 10:44, 15 February 2016

Lithography Thin film processing Characterization Other
  • AJA Systems
  • E-Gun evaporator
  • Spinners
  • ALD 1
  • ALD 2
  • DC sputter
  • MBE
  • Scriber Süss
  • Scriber Loomis
  • RTP AW 610
  • Biorad oven
  • µ-wave plasma oven
  • Denier RF-asher
  • K&S Ball Bonder
  • Edwards evaporator