Resists: Difference between revisions

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== Photoresists ==
This is a list of resists stocked at the [[Main Page|NBI cleanroom]].


* [[AZ 1505]]
There is a separate page for experimentally determined [[Doses|doses]].
* AZ 4500 series
== Stocked resists ==
* AZ 5214 E
 
* AZ nLOF 2000
=== Photoresists ===
* MR ma-N 400 & 1400
 
* [[AR-N 7520]] NEW (high sensitivity)
* [[AZ 1505]] ([https://www.microchemicals.com/micro/tds_az_1500_series.pdf technical data sheet])
* AZ 4500 series ([https://www.microchemicals.com/micro/tds_az_4500_series.pdf data sheet])
* AZ 5214 E ([https://www.microchemicals.com/micro/tds_az_5214e_photoresist.pdf data sheet])
* AZ nLOF 2000 ([https://www.microchemicals.com/micro/tds_az_nlof2000_series.pdf data sheet])
* MR ma-N 400 & 1400 ([https://www.microresist.de/en/?jet_download=2437 data sheet])
* [[AR-N 7520]] NEW (high sensitivity) ([https://www.allresist.com/wp-content/uploads/sites/2/2020/03/AR-N7520new_english_Allresist_product-information.pdf data sheet])
* [[AR-N 7520]] ORIG. (low sensitivity)
* [[AR-N 7520]] ORIG. (low sensitivity)
* SU-8 ([https://kayakuam.com/wp-content/uploads/2020/09/KAM-SU-8-2-25-Datasheet-9.3.20-final.pdf data sheet])
=== Electron beam resists ===


== Electron beam resists ==
{| class="wikitable"
|+ Current stock in Cleanroom
|-


* PMMA
! PMMA series !! Common name !! Thickness (nm at 4000 rpm for 60 sec)
* AR-P 6200 (CSAR 62)
|-
| AR-P 672.02 (PMMA 950K)||A2 ||70
|-
| AR-P 672.03 (3%PMMA 950K)||A3 ||120
|-
| AR-P 672.045 * PMMA A4.5||A4 || 250
|-
| AR-P 672.06||A6 || 450
|-
|AR-P 672.08 PMMA 950K||A8 || 800
|-
| AR-P 642.09 PMMA 200K || A9 ||
|-
 
! EL series ||Common name || Thickness (nm at 4000 rpm for 60 sec)
|-
|MMA( 8.5 )MAA EL6 || EL6 ||
|-
|MMA( 8.5 )MAA EL9 || EL9 ||
|-
|MMA( 8.5 )MAA EL13 || EL13 ||
|-
! AR-N  resists ||Common name || Thickness (nm at 4000 rpm for 60 sec)
|-
|AR-N 7520.07 || ||
|-
|AR-N 7520.11 || ||
|-
|AR-N 7520.18 || ||
|-
! CSAR series ||Common name || Thickness (nm at 4000 rpm for 60 sec)
|-
|AR-P 6200.04 || CSAR 4 ||80
|-
|AR-P 6200.09 || CSAR 9 ||200
|-
|AR-P 6200.13 || CSAR 13||400
 
|-
!Adhesion Promoter ||Common name || Thickness (nm at 4000 rpm for 60 sec)
|-
|AR 300-80 NEW Adhesion promoter || ||
|-
 
 
!AR-PC ||Common name || Thickness (nm at 4000 rpm for 60 sec)
|-
|AR-PC 5090.02 || ||40
|}
 
* PMMA A-series ([https://kayakuam.com/wp-content/uploads/2021/07/KAM-PMMA-Datasheet-4.12.21-final.pdf data sheet])
* AR-P 6200 (CSAR) ([https://www.allresist.com/wp-content/uploads/sites/2/2020/03/AR-P6200_CSAR62english_Allresist_product-information.pdf data sheet])
* ZEP 520A
* ZEP 520A
* MMA copolymer
* MMA copolymer EL-series ([https://kayakuam.com/wp-content/uploads/2021/07/KAM-PMMA-Datasheet-4.12.21-final.pdf data sheet], [https://wiki.nbi.ku.dk/qdevwiki/CSAR_resist_(AR-P_6200) page on the internal QDev wiki])
* SU-8
 
== What's in a name? ==
 
Some product names are straightforward, like PMMA 950K A4.
 
PMMA: polymethylmethacrylate
 
950K: molecular weight
 
A4: solvent and solids wt%, in this case anisole 4%
 
 
NBI cleanroom uses this convention. E.g. A4, EL6 (PMMA 950K ethyl lactate 6%), CSAR9 (CSAR 9%).
 
 
Some product names are vendor specific, like AR-P 672.045.
 
AR: vendor AllResist
 
P: positive resist
 
672: product series, in this case PMMA 950K in anisole
 
045: 4.5% solids in wt%
 
== Purchasing ==
 
=== micro resist ===
 
MicroChem was bought by Kayaku. micro resist is the European distributor.
 
Slow lead time (3-6 weeks), short shelf life (11 months), large minimum (500 ml), expensive.
 
Always ask for expiration date of the batch you're ordering, might be as short as 3 months.
 
Only source for copolymer EL-series (MMA (8.5) MAA in ethyl lactate).
 
Sales [mailto:sales@microresist.de sales@microresist.de]
 
PMMA A-series: PMMA 950K AX
 
Copolymer EL-series: MMA MAA ELX
 
Negative resist: ma-N 2403
 
=== AllResist ===
 
Has PMMA substitutes, short lead time, cheaper, small minimum (30 ml), longer shelf life.
 
Only source for CSAR.
 
Sales [mailto:order@allresist.de order@allresist.de]
 
PMMA 950K in anisole: AR-P 672.XXX
 
CSAR in anisole: AR-P 6200.XX (lowest is 4%, but can successfully dilute with anisole)
 
Negative resist: AR-N 7520.XX
 
=== Zeon ===
 
ZEP 520A
 
== Ancillaries ==
 
=== AllResist ===
 
PMMA developer: AR 600-56
 
Adhesion promoter: AR 300-80 ([https://wiki.nbi.ku.dk/qdevwiki/Adhesion_promoter_AR_300-80 info on internal QDev wiki])
 
=== micro resist ===
 
ma-N developer: ma-D 525
 
=== SigmaAldrich/Merck ===
 
Wheaton wide-mouth bottle: capacity 30 mL, amber, white polypropylene cap, PTFE flat liner [https://www.sigmaaldrich.com/DK/en/product/aldrich/z250155]
 
[[Category:Fabrication]]

Latest revision as of 09:40, 27 November 2024

This is a list of resists stocked at the NBI cleanroom.

There is a separate page for experimentally determined doses.

Stocked resists

Photoresists

Electron beam resists

Current stock in Cleanroom
PMMA series Common name Thickness (nm at 4000 rpm for 60 sec)
AR-P 672.02 (PMMA 950K) A2 70
AR-P 672.03 (3%PMMA 950K) A3 120
AR-P 672.045 * PMMA A4.5 A4 250
AR-P 672.06 A6 450
AR-P 672.08 PMMA 950K A8 800
AR-P 642.09 PMMA 200K A9
EL series Common name Thickness (nm at 4000 rpm for 60 sec)
MMA( 8.5 )MAA EL6 EL6
MMA( 8.5 )MAA EL9 EL9
MMA( 8.5 )MAA EL13 EL13
AR-N resists Common name Thickness (nm at 4000 rpm for 60 sec)
AR-N 7520.07
AR-N 7520.11
AR-N 7520.18
CSAR series Common name Thickness (nm at 4000 rpm for 60 sec)
AR-P 6200.04 CSAR 4 80
AR-P 6200.09 CSAR 9 200
AR-P 6200.13 CSAR 13 400
Adhesion Promoter Common name Thickness (nm at 4000 rpm for 60 sec)
AR 300-80 NEW Adhesion promoter
AR-PC Common name Thickness (nm at 4000 rpm for 60 sec)
AR-PC 5090.02 40

What's in a name?

Some product names are straightforward, like PMMA 950K A4.

PMMA: polymethylmethacrylate

950K: molecular weight

A4: solvent and solids wt%, in this case anisole 4%


NBI cleanroom uses this convention. E.g. A4, EL6 (PMMA 950K ethyl lactate 6%), CSAR9 (CSAR 9%).


Some product names are vendor specific, like AR-P 672.045.

AR: vendor AllResist

P: positive resist

672: product series, in this case PMMA 950K in anisole

045: 4.5% solids in wt%

Purchasing

micro resist

MicroChem was bought by Kayaku. micro resist is the European distributor.

Slow lead time (3-6 weeks), short shelf life (11 months), large minimum (500 ml), expensive.

Always ask for expiration date of the batch you're ordering, might be as short as 3 months.

Only source for copolymer EL-series (MMA (8.5) MAA in ethyl lactate).

Sales sales@microresist.de

PMMA A-series: PMMA 950K AX

Copolymer EL-series: MMA MAA ELX

Negative resist: ma-N 2403

AllResist

Has PMMA substitutes, short lead time, cheaper, small minimum (30 ml), longer shelf life.

Only source for CSAR.

Sales order@allresist.de

PMMA 950K in anisole: AR-P 672.XXX

CSAR in anisole: AR-P 6200.XX (lowest is 4%, but can successfully dilute with anisole)

Negative resist: AR-N 7520.XX

Zeon

ZEP 520A

Ancillaries

AllResist

PMMA developer: AR 600-56

Adhesion promoter: AR 300-80 (info on internal QDev wiki)

micro resist

ma-N developer: ma-D 525

SigmaAldrich/Merck

Wheaton wide-mouth bottle: capacity 30 mL, amber, white polypropylene cap, PTFE flat liner [1]

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