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Combined display of all available logs of cleanroom. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 15:07, 10 November 2025 Zhe talk contribs created page File:F125.jpg
- 15:07, 10 November 2025 Zhe talk contribs uploaded File:F125.jpg
- 15:06, 10 November 2025 Zhe talk contribs reverted File:Tool Elionix.jpg to an old version (Reverted to version as of 14:04, 5 December 2016 (UTC))
- 15:01, 10 November 2025 Zhe talk contribs uploaded a new version of File:Tool Elionix.jpg
- 14:59, 10 November 2025 Zhe talk contribs created page Elionix F-125 (Created page with "{{Infobox tool |image = Tool Elionix.jpg |toolfullname = Elionix F125 |website = http://www.elionix.co.jp/english/ |company = ELIONIX INC. |description = Electron beam lithography system |location = 01.K03 |primary = Zhe |secondary = Harry }} Elionix F125 is a 125 kV acceleration electron beam lithography tool. == Tool Specification == * Acceleration voltage 50,75,100,125 kV * Minimum beam diameter - 1.8 nm * Beam current - 100 pA to 100nA * Field Size - Min 100 um Ma...")
- 13:22, 23 May 2023 Zhe talk contribs created page Plassys Evaporator (Created page with "== Overview == Plassys system is for thin film deposition by electron beam evaporation. It also provides an ion gun for surface preparation and etching purposes. The system...")
- 15:18, 15 March 2023 Zhe talk contribs created page File:Tool Responsible.jpg
- 15:18, 15 March 2023 Zhe talk contribs uploaded File:Tool Responsible.jpg
- 15:07, 15 March 2023 Zhe talk contribs created page File:ToolResponsible.jpg
- 15:07, 15 March 2023 Zhe talk contribs uploaded File:ToolResponsible.jpg
- 10:45, 9 March 2023 Zhe talk contribs created page File:EBL Resist List.png
- 10:45, 9 March 2023 Zhe talk contribs uploaded File:EBL Resist List.png
- 09:16, 29 March 2022 Zhe talk contribs uploaded a new version of File:Tools CPD.jpg
- 09:12, 29 March 2022 Zhe talk contribs created page File:Tools CPD.jpg
- 09:12, 29 March 2022 Zhe talk contribs uploaded File:Tools CPD.jpg
- 14:45, 15 March 2022 Zhe talk contribs created page Critical point dryer (Created page with "{{Infobox tool |image = Tools CPD.jpg |toolfullname = Critical Point Dryer Leica EM CPD300 |website = https://www.leica-microsystems.com/products/sample-preparation-for-electr...")
