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• 14:59, 10 November 2025 Zhe talk contribs created page Elionix F-125 (Created page with "{{Infobox tool |image = Tool Elionix.jpg |toolfullname = Elionix F125 |website = http://www.elionix.co.jp/english/ |company = ELIONIX INC. |description = Electron beam lithography system |location = 01.K03 |primary = Zhe |secondary = Harry }} Elionix F125 is a 125 kV acceleration electron beam lithography tool. == Tool Specification == * Acceleration voltage 50,75,100,125 kV * Minimum beam diameter - 1.8 nm * Beam current - 100 pA to 100nA * Field Size - Min 100 um Ma...")