Plassys Evaporator

Overview

Plassys system is for thin film deposition by electron beam evaporation. It also provides an ion gun for surface preparation and etching purposes. The system has the capability of in-situ oxidation .

Currently loaded materials

Crucible position Material Comment 1 Ti Plassys ( currently In Use) 2 Al Plassys ( Material consumed) 3 Al Melted. Currently In Use 4 Al new pellets. Not melted Substrates allowed Silicon and Sapphire only