Resists
Photoresists
- AZ 1505 (technical data sheet)
- AZ 4500 series (data sheet)
- AZ 5214 E (data sheet)
- AZ nLOF 2000 (data sheet)
- MR ma-N 400 & 1400 (data sheet)
- AR-N 7520 NEW (high sensitivity) (data sheet)
- AR-N 7520 ORIG. (low sensitivity)
- SU-8 (data sheet)
Electron beam resists
- PMMA A-series (data sheet)
- AR-P 6200 (CSAR) (data sheet)
- ZEP 520A
- MMA copolymer EL-series (data sheet)