Diener plasma asher
 | |
| Essentials | |
|---|---|
| Full name | Femto |
| Manufacturer | Diener electronic GmbH + Co. KG |
| Description | Plasma cleaning/etching system |
| Location | Cleanroom 1 |
| Manual | TBD |
| Responsibility | |
| Primary | TBD |
| Secondary | TBD |
| |
| Essentials | |
|---|---|
| Full name | Femto |
| Manufacturer | Diener electronic GmbH + Co. KG |
| Description | Plasma cleaning/etching system |
| Location | Cleanroom 1 |
| Manual | TBD |
| Responsibility | |
| Primary | TBD |
| Secondary | TBD |