Doses

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125 kV
Si InAsUC InPUC GaAsUC SiGe
A2 1000 700 ? ? ?
A4 1000 700 ? 630 ?
A6 1200 ? ? 760 ?
El6 ? ? ? ? ?
El9 ? ? ? 420 ?
CSAR4 430 ? ? ? ?
CSAR9 ? ? ? ? ?
CSAR13 450 ? ? 350 ?
50k+A4 ? ? ? 745 ?
100 kV
Si InAsUC InPUC GaAsUC SiGe
A2 900 ? 500 ? ?
A4 900 ? 500 630 ?
A6 1000 ? ? 670 ?
El6 ? ? ? ? ?
El9 ? ? ? ? ?
CSAR4 400 ? ? ? ?
CSAR9 ? ? ? ? ?
CSAR13 ? ? ? ? ?
50k+A4 ? ? ? 630 ?

125 kV

GaAs

Uniform clearing

InP

Uniform clearing

InAs

Uniform clearing

Si

Optimal contrast

100 kV

GaAs

Uniform clearing

InP

Uniform clearing

InAs

Uniform clearing

Si

Optimal contrast

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