Doses

125 kV

GaAs

A6: 742 uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA

Si

CSAR 9: 430 uC/cm2 optimal contrast

A4: 1000 uC/cm2

A6: 1200 uC/cm2 (or 1000 uC/cm2 with longer development? To be tested)

100 kV

GaAs

A6: --- uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA

InP

A4.5%: 600 uC/cm2 Uniform clearing Beamer base dose/60s MIBK:IPA dev/10s IPA

Si

CSAR 9: 400 uC/cm2 optimal contrast/ 30s O-Xylene/5s conc. MIBK/IPA

A4: 800 uC/cm2/40s MIBK:IPA dev./10s IPA

A6: 1000 uC/cm2/60s MIBK:IPA dev./10s IPA