Doses

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125 kV

GaAs

A6: 742 uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA

InP

InAs

Si

CSAR 9: 430 uC/cm2 optimal contrast A4: 1000 uC/cm2 A6: 1200 uC/cm2 (or 1000 uC/cm2 with longer development? To be tested)

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