Main public logs

Combined display of all available logs of cleanroom. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).

• 15:42, 10 February 2025 Harry talk contribs created page BEAMER (Created page with "Beamer is a software package used to process design files (.dxf, .gds, etc.) and make them ready for e-beam lithography machines. Crucially, it includes a proximity error correction (PEC) module. For any questions regarding Beamer use, please first refer to the manual: '''Help > Help Manual (F1).''' Elionix-specific documentation: '''Help > Formatter Notes > Elionix'''. It thoroughly covers all modules, their use, some theory, as well as includes helpful examples. On...")
• 17:30, 16 December 2024 Harry talk contribs created page Resist spin coating (Created page with "= How to behave = * Always think of safety first! * Wait patiently for the previous user to finish their process in the spin coater and then you can start using the fumehoom. * Minimise the duration for which the resist bottle stays open (without a lid). * Clean the spinner and the chuck until there are no resist marks left ** Use 1,3 Dioxolane for CSAR and LOR3B resists ** In any other case use Acetone = How to spin coat = * Log your process in the designat...")