Tools

Lithography	Thin film processing	Characterization	Other
e-Line Litho Elionix Raith eLine Heidelberg µPG 501 Süss mask aligner	AJA systems E-Gun evaporator Spinners ALD 1 ALD 2 DC sputter MBE	JEOL JSM 6320F JEOL JSM 7800F e-Line SEM TEM Alphastep Optical profiler Optical microscopes AFM	Scriber Süss Scriber Loomis RTP Biorad oven µ-wave plasma oven Denier RF-asher K&S Ball Bonder Edwards evaporator