Tools

From cleanroom
Revision as of 22:45, 14 February 2016 by Petur (talk | contribs)
Jump to navigation Jump to search
Lithography Thin film processing Characterization Other
  • e-Line Litho
  • Elionix
  • Raith eLine
  • Heidelberg µUPG 501
  • Süss mask aligner
  • AJA systems
  • E-Gun evaporator
  • Spinners
  • ALD 1
  • ALD 2
  • DC sputter
  • MBE
  • JEOL JSM 6320F
  • JEOL JSM 7800F
  • e-Line SEM
  • TEM
  • Alphastep
  • Optical profiler
  • Optical microscopes
  • AFM
  • Scriber Süss
  • Scriber Loomis
  • RTP
  • Biorad oven
  • µ-wave plasma oven
  • Denier RF-asher
  • K&S Ball Bonder
  • Edwards evaporator
Retrieved from "https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&oldid=242"