Tools

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Lithography

e-Line Litho
Elionix
Raith eLine
Heidelberg µUPG 501 LED writer
Süss mask aligner

Thin film deposition

AJA systems
E-Gun evaporator
Spinners
ALD 1
ALD 2
DC sputter
MBE

Characterization

JEOL JSM 6320F
JEOL JSM 7800F
e-Line SEM
TEM
Alphastep
Optical profiler
Optical microscopes
AFM

Other

Scriber Süss
Scriber Loomis
RTP
Biorad oven
µ-wave plasma oven
Denier RF-asher
K&S Ball Bonder
Edwards evaporator

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