Diener plasma asher
 | |
| Essentials | |
|---|---|
| Full name | Femto |
| Manufacturer | Diener electronic GmbH + Co. KG |
| Description | Plasma cleaning/etching system |
| Location | Cleanroom 1 |
| Responsibility | |
| Primary | Nader |
| Secondary | Martin |
Usage rules
This tool is for semiconductors only. This means no daughterboards, beakers, tweezers, etc.
Make sure your samples are absolutely 100% dry before putting them in the asher.
Quick-start guide
Video on how to operate our Diener Plasma Asher:
Click here to watch video on YouTube
Load your sample
- Open the door.
- Slide out the quartz plate.
- Place your sample in the center.
- Slide the plate back in.
- Close door.
- Turn on pump using the green button labeled PUMP.
Execute an ashing program
- On the touch screen, using the stylus, press the small up/down arrows to select the desired program (plasma time).
- Press the green button labeled START.
- Wait for the program to finish.
- When it is time for the plasma to strike, you can look through the mesh in the door and check for a purple glow inside the chamber.
- When the program is done the status squares will turn white on the screen.
Unload your sample
- Turn off the pump.
- Open the door.
- Slide out the plate.
- Remove your sample.
- Close the door.
- Fill in the log book beside the tool.
- Done!