Doses
| Si | InAsUC | InPUC | GaAsUC | SiGe | |
| A2 | 1000 | 700 | ? | ? | ? |
| A4 | 1000 | 700 | ? | 630 | ? |
| A6 | 1200 | ? | ? | 760 | ? |
| El6 | ? | ? | ? | ? | ? |
| El9 | ? | ? | ? | 420 | ? |
| CSAR4 | 430 | ? | ? | ? | ? |
| CSAR9 | ? | ? | ? | ? | ? |
| CSAR13 | 450 | ? | ? | 350 | ? |
| Si | InAsUC | InPUC | GaAsUC | SiGe | |
| A2 | 900 | ? | 500 | ? | ? |
| A4 | 900 | ? | 500 | 630 | ? |
| A6 | 1000 | ? | ? | 670 | ? |
| El6 | ? | ? | ? | ? | ? |
| El9 | ? | ? | ? | ? | ? |
| CSAR4 | 400 | ? | ? | ? | ? |
| CSAR9 | ? | ? | ? | ? | ? |
| CSAR13 | ? | ? | ? | ? | ? |
125 kV
GaAs
Uniform clearing
InP
Uniform clearing
InAs
Uniform clearing
Si
Optimal contrast
100 kV
GaAs
Uniform clearing
InP
Uniform clearing
InAs
Uniform clearing
Si
Optimal contrast
100 kV
GaAs
A6: --- uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK:IPA/10s IPA
CSAR 13: 480uC/cm2 base dose (likely overdosed)/ 24s o-Xylene/5s conc. MIBK develop/IPA rinse
EL9: 380 uC/cm2 base dose/ 45s MIBK:IPA/ 10s IPA rinse